Design and Fabrication of Glass-based Integrated Passive Devices

The integrated passive device technology is important to realize high performance, small volume, low cost ant multi-functional integration for wireless RF front-end applications. And glass substrate become more and more popular in passive device fabrication because of its low dielectric loss, high thermal stability, high resistivity, and adjustable Coefficient of Thermal Expansion. In this paper, we have designed and fabricated circular planar inductors and band-pass filter based on our unique glass based integrated passive device fabrication technology. All inductors showed good frequency performance, and the Q kept around 20 for all inductance from 2 nH to 50 nH at 1.5 GHz. The compact 1.6mm×1.6mm filter operated in a band between 1555 MHz and 1595 MHz also shows a high Q of 6.3.