The fabrication and characterization of nano-aperture VCSEL array head for high density near-field optical data storage

A 2D nano-aperture VCSEL array head of near-field optics was studied with the formation of small aperture on the VCSEL surface after the deposition of dielectric and metal films. Its optical properties were also characterized to apply the VCSEL array for the near-field optical memory system of higher data capacity and speed. In this study, we could produce very small aperture of around 50 nm in diameter successfully using a focused ion beam (FIB) method, and get the reasonable increasement in the laser power with the formation of nano-aperture on each VCSEL emitting surface.