3D Fin Waveguide on 10nm Gate Oxide Bonded Double-SOI for Low VΠL Accumulation Modulator

We propose a new design for a low VπL accumulation optical modulator using 3-Dimensional (3D) Fin-waveguides on double Silicon-On-Insulator (SOI). We have introduced and demonstrated a novel, self-aligned patterning process to pattern the bottom SOI layer using anisotropic wet etching.