Differential Pressure Sensor Using Integrated Optical MEMS and Double Ring Resonator

In this work, we designed and simulated a differential pressure sensor using a double ring resonator with radius 5μm and 4μm placed on the fixed of a cantilever beam with dimensions 100μm × 30μm x 5μm. The stress induced on the cantilever changes the refractive index in the waveguide which results in the shift of the resonant wavelength. A sensitivity of 15.544pm/kPa is achieved. The sensor is operated at wavelength equal to 1.55μm and can be used for aircraft, medicine and automobile.