A 600 Kpixels Image Sensor Operates at 100Mfps for Multi-Framing Camera

To achieve ultra-high speed imaging and also high sensitivity, a novel structure of image sensor, Backside-Illuminated Multi-Collection-Gate (BSI-MCG) was proposed in 2013. We have been working for the target temporal resolution of nanosecond order. Then, we named the image sensor "Nano-Second Image Sensor" or "NanoSIS". In the sensor, incident light arrives the sensor on the backside and generates signal electrons. The signals electrons travel to the front side on which five collection gates and a drain gate are placed like petals of a flower of the pixel. At a certain time, the signal electrons are collected by one of the collection gates in turn. The temporal resolution of the sensor is limited by the variation of the travel time of signal electrons. The test sensor is fabricated and under evaluation. The frame rate of 100 Mfps or the temporal resolution of 10 ns is successfully achieved. The sensor can capture 5 consecutive frames with 600 kpixels or 10 consecutive frames with 300 kpixels. The sensor may be applicable to imaging TOF MS (Time-of-Flight mass spectrometry) and/or FLIM (Fluorescence Lifetime Imaging Microscopy). The paper presents the structure of the sensor and the evaluation results to prove the achieved frame rate.