An Integrated On-Chip Flux Concentrator for Galvanic Current Sensing

On-chip integration of a magnetic flux concentrator with a galvanic current sensor is proposed. Our layout utilizes a discontinuity in a magnetic via, resulting in the penetration of the magnetic field into the substrate. A conversion factor of 96 mT/A is predicted via simulations corresponding to a magnetic gain 1.8× in comparison with air. The permeability of the magnetic core required is 500, much lower than that reported in off-chip concentrators, resulting in a significant easing of the specifications of the material properties of the core.