A High-Linearity SP12T RF MEMS Switch Using Parallel Dual-Cantilevers for 5G and Beyond Applications

Design, fabrication, and measurement of a single-pole-twelve-throw radio frequency (RF) micro-electro-mechanical systems switch are presented in this letter. A switch with specially designed parallel dual-cantilevers is used to improve the RF matching. Pure Au–Au contacts are applied to maintain the low insertion loss and verify the high linearity of the switch. A least square method is introduced to remove the uncertainty from the measurement of the third-order intermodulation intercept point (IIP3). The measurement results show that the insertion loss and isolation of each channel of the switch are better than 0.94 and 30 dB from dc to 8 GHz, respectively. The measured IIP3 of each channel is higher than 60 dBm. The switch works over 1 million cycles under cold-switching condition with 200-mA dc power.