Heterogeneous Integrated Displacement Sensor with an Innovative Design

This paper describes a detailed innovative design of displacement sensor, its principle of the work, the used setup for the measurement of the fabricated sensor and the obtained results. Heterogeneous integrated technology which incorporates additive 3D technology, printed circuit board and inkjet printing technology is used for fabrication of sensor. The parts that form the sensor are: an electrode on the membrane, a spacer and the inductor. The measurement of displacement using a fabricated sensor is achieved using the polyimide foil sensitive to the applied load on the surface of the sensor. Compared with the previously developed sensor, the additional segments are included in order to increase the capacitance of the sensor.