X-band tunable MEMS resonators

This paper demonstrates the use of MEMS varactors and switches in tunable resonators for filter and oscillator applications. These MEMS varactors and switches have higher quality factors and much lower loss than typical varactor diodes, making them suitable for use in high Q circuits. Equivalent circuit models for the shunt switch and varactor are presented and are used to fabricate tunable resonators around 10 GHz. Application areas are tunable filters and low phase-noise oscillators for communications systems.