Small-size bimorph mirror with high spatial resolution of the electrodes

semipassive bimorph flexible mirrors is one of the most widely used devices for correction of the given laser beam intensity. However, the key disadvantage of these kind of mirrors is their low spatial resolution of the corrected phase. In this work, we present two approaches for increasing spatial resolution of the deformable mirrors - one to use a multilayer bimorph mirrors and another to put higher density of control electrodes and use ultrasonic welding to make the wire connection to these electrodes.