Sliding Mode Control with Disturbance Rejection for Piezoelectric Nanopositioning Control

This paper presents the design of an active disturbance rejection control with sliding mode component (SMCDR) and its implementation for position control of a piezo-driven positioning stage. As compared with conventional sliding mode method, the proposed SMCDR releases the requirement of accurate plant model and it is easy to implement. The nonlinearity and uncertainty parts of the piezo-driven system are considered as lumped disturbance and estimated by an extended state observer (ESO). The stability of the proposed controller is proved with a rigorous Lyapunov method. Comparative experimental results show that the proposed SMCDR exhibits superior performance over conventional active disturbance rejection controller and sliding mode controller in position tracking application.