Structuring Methods of Polymers for low Cost Sensor Manufacturing

A new manufacturing technique for low cost sensor production was developed at the Institute of Micro Production Technology at the Leibniz University Hanover. The herein described manufacturing technique uses common injection molding processes to pre-structure thermoplastic polymers such as Polycarbonate, which can subsequently be used as a substrate to build up sensor structures. The sensor structures are generated by sputter deposition and a following chemical mechanical polishing step. The realized sensor structure can be manufactured neglecting any lithography processes and therefore eliminates expensive clean room technology. This work investigates and optimizes injection molding parameter using design of experiment methods. Following the parameter studies, a manufacturing process designed to realize a micro technologically fabricated injection mold inlay was performed, and the performance of an electroplated Ni based injection mold master form for sensor structure manufacturing evaluated. A temperature sensor on a thermoplastic substrate (polycarbonate) prototype was realized, which was able to prove the feasibility of the manufacturing technique and the robustness of polymers as a substrate material.