An Aluminum Nitride Integrated Photonics Platform for the Ultraviolet to Visible Spectrum

We demonstrate a wide-bandgap semiconductor photonics platform based on aluminum nitride on sapphire. We measure ring resonators with quality factor >140, 000 at 638 nm and >20, 000 down to 369 nm, which shows a promising path for low-loss integrated photonics in the ultraviolet and visible spectrum.