Phase Noise Measurements of AlN Contour-Mode Resonators With Carrier Suppression Technique

In this paper, the phase noise of aluminum nitride (AlN) contour-mode resonators is investigated using a passive measurement system with carrier suppression. The purpose is to make careful measurements of the performance of AlN resonators in order to better understand and clarify previously reported frequency instability in these devices. The resonant frequencies of the resonators are around 220 MHz. The motional parameters, the thermal behavior, and the nonlinear power effect of these resonators have been evaluated. Then, the principle of the noise measurement system is reviewed, and the resonator conditioning is shown. Finally, the noise measurements of the resonators are presented and discussed.