Deposition study of stacked zinc oxide — Molybdenum oxide film by spray pyrolysis

Stacked zinc oxide-molybdenum oxide thin films with different molybdenum oxide thickness were prepared on silicon substrate by spray pyrolysis with zinc acetate and molybdenum chloride precursors. In the photoluminescence analysis, the zinc oxide related peaks were characterized for all films. With the increase of molybdenum oxide thickness, the near band edge emission corresponded to zinc oxide remains and the donor-exciton and defect-related peaks were inhibited. The band bending between zinc oxide and molybdenum oxide in interface were discussed.