Long-term actuation demonstration of RF-MEMS switches for space applications

This work presents an RF MEMS switch developed to meet the redundancy satellite applications. It is made of a specific material known to be resistant to mechanical creep that allow to reduce parasitic capacitances and create RF switching capability from DC to 67 GHz. Measurements show insertion loss smaller than 1 dB and an isolation better than 43 dB up to 50 GHz. Reliability tests related a stable actuation mechanism and a constant electrical contact during 6 months of constant biasing at 20°C.