Automated reduced order model generation for MEMS

This paper demonstrates and discusses a highly automated approach for the design of micro-electro-mechanical systems (MEMS) and system-level multi-domain reduced order model generation. The presented techniques enable fast and efficient model adaption and optimization of components in the different phases of the MEMS design process by providing sufficiently fast and accurate modeling solutions. In the following, two different methods are discussed and compared: The order reduction method based on a rigid body model representation (RBM) and the order reduction based on modal superposition technologies (MSUP).