Developing self-powered high performance sensors: Part I - a tri-axial piezoelectric accelerometer with an error compensation method

This paper firstly proposes a self-powered piezoelectric tri-axial accelerometer, based on the electromagnetic energy harvesting mechanism. Secondly, the structure of seismic mass is improved to harvest more power under the horizontal vibration. The optimized output power reaches 10mW under horizontal vibration at 100Hz, according to the simulation results. In the end, the loss of accuracy due to power-supply part is analyzed and an error compensation method is presented.