FIB-induced damage in graphene electrodes for piezoelectric resonators

A first vibrating inertial quartz resonator with graphene electrodes patterned by Focused Ion Beam (FIB) is presented in this paper. The first electrical measurements have however shown that the quality factor is below the theoretical expectation. Several hypotheses are analyzed. The FIB etching process of graphene can lead to the deposition of amorphous carbon. Its impact on the mechanical behavior of the resonator is examined. The effect of ion damages at the quartz surface through implantation and amorphization as well as intrinsic losses emerging from friction at the interface between graphene and quartz are furthermore discussed.