27.5 kV 4H-SiC PiN diode with space-modulated JTE and carrier injection control

Ultra-high-voltage 4H-SiC PiN diode with a space-modulated junction termination extension and carrier injection control has been investigated. The introduction of a space-modulated region results in a high breakdown voltage of 27.5 kV, that is the highest among the values reported for 20 A class 4H-SiC PiN diodes. The simulated and measured forward characteristics of the 4H-SiC PiN diode with the carrier injection control are also reported. Forward voltage and on-resistance decrease as carrier lifetime increases. The introduction of carrier injection control at the anode and cathode sides results in reduction in carrier concentration. The measured characteristics exhibit good correlation with simulated results. Based on these results, we can confirm the effect of carrier lifetime on electrical characteristics.