6.5 kV field shielded anode (FSA) diode concept with 150C maximum operational temperature capability

In this paper we present a low leakage current 6.5 kV field shielded anode (FSA) diode with high forward bias safe operating area (FBSOA) ruggedness capable of reliable operation up to 150 °C. This is achieved through optimization of the junction termination, the resistive zone (RZ) between this area and the active region and selective shallow ion irradiation for local lifetime control. As a result, the diode maintains or exceeds the softness, surge current and FBSOA capabilities set by the 6.5 kV carrier axial lifetime (CAL) diode, while also reducing its (125 °C) leakage current by more than 4 times achieving magnitudes typically associated with low leakage emitter efficiency control (EMCON) based concepts.