Ultra-Wideband Variable Temperature Measurement System for Complex Permeability of Magnetic Thin Film Fe66Co17B16Si1

In this paper, a measurement system is proposed for the measurement of the complex permeability of magnetic thin film Fe
₆₆
Co
₁₇
B
₁₆
Si
₁
in the temperature range of -50 °C to 100 °C. Based on the transmission line theory, a shorted air microstrip line is designed for the high-precision measurement of the thin film. The magnetic film Fe
₆₆
Co
₁₇
B
₁₆
Si
₁
with the thickness of 240 nm is measured in the frequency range of 0.05-12 GHz at the different temperatures. The measurement results are in good agreement with standard values. The repeatability tests verified the stability of the system.