High-Speed High-Efficiency Broadband Silicon Photodiodes for Short-Reach Optical Interconnects in Data Centers

We demonstrate a silicon-based surface-illuminated CMOS-compatible broadband photodiode with ≤30ps FWHM and above 55% EQE at 850nm for up to 50Gb/s by using photon-trapping micro/nano-structures. This is the fastest reported response for a Silicon photodiode.