CMOS-Compatible Silicon Photonic IQ Modulator for 84 Gbaud 16QAM and 70 Gbaud 32QAM

Using an all-silicon modulator, we demonstrate single-polarization 336 Gb/s (84 Gbaud) 16QAM and 350 Gb/s (70 Gbaud) 32QAM at BER well below 20% FEC-threshold. We achieved a net rate of 291 Gb/s on a single polarization.