DFT-enabled within-die AC uniformity and performance monitor structure for advanced process

An on-chip ring oscillator based process monitoring vehicle embedded within host automatic place and route digital blocks and accessed through design for testability (DFT) circuit is introduced and characterized. Within-wafer AC uniformity (ACU), performance and power consumption for the ring oscillator are analyzed in a 7 nanometer technology testchip. The design and analysis techniques described are suitable to monitor process variation, real-time power fluctuation and performance proxy of host digital blocks in products.