A surface mounted DC/DC boost converter using micromachined planar inductors

Recently there has been great demand for on-chip DC/DC power converters in the field of wireless communications, especially in cellular phones, laptops and distributed electronic systems. The realization of on-chip Dc/DC converters has been considered as one of the difficult tasks due to the lack of appropriate planar chip inductors. However recently we have successfully realized micromachined planar inductors using a new LIGA-like micromachining technique Ill.