Sliding Mode Tracking Control With Perturbation Estimation for Hysteresis Nonlinearity of Piezo-Actuated Stages

Piezo-actuated stages are widely applied in the field of high-precision positioning. However, piezo-actuated stages produce hysteresis between the input voltage and the output displacement that negatively influences the positioning accuracy. In this paper, the Bouc-Wen model is established and identified using the bat-inspired optimization algorithm. Subsequently, based on the established hysteresis model, we propose a sliding mode control method with a new reaching law to suppress the hysteresis nonlinearity and achieve high-precision tracking control for the piezo-actuated stages. In addition, the proposed control method contains the perturbation estimation part, which can estimate online the modeling uncertainty and the unknown external disturbances. The stability of the proposed control method is demonstrated through the Lyapunov theory. Finally, to validate the effectiveness of the proposed control method, experiments are conducted on the piezo-actuated stages. Experimental results demonstrate that the proposed control method is superior to the feed-forward control and the conventional sliding mode control method.