Lateral Current Spreading in III-N Ultraviolet Vertical-Cavity Surface-Emitting Lasers Using Modulation-Doped Short Period Superlattices

Lateral hole injection into AlGaN-based ultraviolet (UV) vertical-cavity light-emitting lasers (VCSELs) has been studied via numerical simulation. For blue and violet vertical cavity light emitters, indium tin oxide (ITO) is most commonly used as a transparent current spreading layer to increase the overlap between the optical mode and the radial current profile. However, ITO has very high optical losses in the UV spectrum, so alternative schemes for lateral current spreading have been investigated for use in UV-VCSELs. A modulation doped short-period superlattice (MD-SPSL) has been proposed as a transparent lateral current spreading layer in UV-VCSELs. The narrow bandgap unintentionally doped (uid) material maintains a high mobility due to reduced impurity scattering and has a high free hole concentration due to modulation doping, thus forming highly conductive channels which aid lateral hole transport. This has been shown to partially mitigate current crowding around the current aperture. To account for imperfect modulation doping due to the magnesium memory effects and other factors, the effect of varying the hole mobility in the uid-narrow bandgap layer of the MD-SPSL from 13-300 cm
²
/(V · s) on the threshold current and slope efficiency has also been studied. Employing an MD-SPSL results in a significant reduction in the threshold current and slope efficiency compared to ITO, and the extent of the improvement depends on the hole mobility in the uid-AlGaN layer.