Modeling and analysis of MEMS based acclerometer in Simulink

MEMS Sensors are devices capable of collecting the data from the surrounding physical environment and converting it into the useful electrical signals for interpretation and analysis. With the growing complexity in MEMS devices and their need in almost all embedded systems, (e.g., Wireless devices) demands a systematic way for MEMS design, modeling and fabrication. In this paper, modeling and behavioural analysis of MEMS based accelerometer is carried out so as to get the knowledge regarding its working for various inputs. The validation of the results was done by connecting the accelerometer sensor already integrated in the mobile through the Matlab Mobile appliction available in the Google Play store. The model was capable of detecting the acceleration value of up to ±5g. MATLAB/ Simulink tool is used to model and analyse the accelerometer sensor.