Closed form model for switching time of a meander hinged MEMS switch with beam perforation effect

We present a new analytical closed form model of the switching time of serpentine flexure type perforated MEMS shunt capacitive switch under squeeze film damping environment. The model is reported first time ever which takes into account the beam perforation, fringing field and stiffness effect simultaneously altogether. Analytic predictions are validated against the simulated results of benchmark FEM solver CoventorWare for some parameters and their variations.