Multi-frequency silicon nanofractal resonator

Novel top down Si-based electrostatically driven clamped-clamped resonator was manufactured. The resonating body (12 μm] in length) is a fractal with a hexagonal shape based on a cell-triangle with a side of 3.354 [pm]. The experimental measurements and simulations proved that the device can resonate at many different excitation frequencies allowing multiple operational responses. The size, and the power needed for actuation are comparable with the ones of single beam resonator.