A mode-localized accelerometer based on four degree-of-freedom weakly coupled resonators

This paper for the first time reports a micromachined mode-localized accelerometer based on a four degree-of-freedom (DoF) weakly coupled resonators (WCRs). With increasing number of DoFs, both sensitivity and resolution obtained a huge improvement. The open-loop experimental results show that the sensitivity based on amplitude ratio (36.86/g) and resolution (54.31 μg) are improved by 838% and 935% respectively compared with the state-of-the-art 3-DoF mode-localized accelerometer (4.4/g, 508 μg) under the same test circumstances. It can be concluded that the 4-DoF system is effective in greatly improving the sensitivity and resolution of mode-localized sensor.