Development of a bistable CMOS-MEMS microbeam resonator with electrostatic actuation

Experimental demonstration of bistability in simple, straight and non-axially-forced clamped-clamped microbeam resonators in the MHz range is reported for the first time. Experimental measurements have been also used to validate a nonlinear electromechanical model for microbeam resonators and its tuning procedure through the thermal effect. The model is used to obtain the design and biasing conditions to achieve bistability is such devices. The measured devices were fabricated and monolithically integrated with readout circuitry using a commercial 0.35μm CMOS technology resulting in a low-cost platform to investigate potential applications of bistability in MEMS devices.