Large-scale MEMS-actuated 2-D optical phased arrays

We report on a novel two-dimensional (2-D) optical phased arrays with 25,600 addressable phase shifters made of diffraction gratings with in-plane movement. The phase shift is independent of wavelength, and only depends on the displacement of the grating. The large optical aperture 3.2×3.1mm
²
produces a narrow beam (0.028°×0.029°) steerable over a field-of-view of 4.4°×4.6° at 1550nm wavelength, with a maximum response time of 4.2μs.