Numerical analysis of the performance of microflown with SHS configuration

In this paper, the microflown with SHS configuration is analyzed by numerical simulation. Compared to conventional acoustic sensors, microflown measures the particle velocity rather than the sound pressure. It has three resistors, two outermost resistors of which are used as sensors, while the resistor located in the middle is used as a heater. As air flows across the sensor, upstream resistor cools down and gives off some heat to the passing air. Hence, downstream resistors lose less heat because the warmer air passes through. The temperature difference can be calculated and analyzed by assuming the ideal circuit structure for the microflown with SHS configuration, respectively.