Large Nonlinearity and Low Loss Ge-Sb-Se Glass Photonic Devices in Near-Infrared

Ge
₂₈
Sb
₁₂
Se
₆₀
waveguides and microresonators were fabricated by thermal evaporation and dry etching technology. The low loss waveguides and high-index-contrast Ge
₂₈
Sb
₁₂
Se
₆₀
microring resonators were developed and demonstrated using the optimal parameters of CF
₄
/CHF
₃
etching recipe. An intrinsic quality factor (Q-factor) of 2.3 × 10
⁵
with propagation loss of 2.4 dB/cm at 1550 nm was obtained in this microring resonator with 800 × 400 nm cross-sectional dimension. Critically coupled resonator showed extinction ratio of >30 dB. Nonlinear refractive index (n
₂
) of 5.12 × 10
^-18
m
²
/W for Ge
₂₈
Sb
₁₂
Se
₆₀
glass was measured and nonlinear coefficient (γ) of 24 W
^-1
m
^-1
asfabricated waveguide was also estimated. This paper illustrates the potential of Ge
₂₈
Sb
₁₂
Se
₆₀
glass as a low loss and large nonlinearity material for integrated photonics applications.