An advanced high-temperature stable multipole resonance probe for industry compatible plasma diagnostics

In this contribution the development of an advanced, high-temperature stable plasma sensor based on the multipole resonance probe (MRP) is presented. Using low temperature co-fired ceramics (LTCC) as substrate material, together with a multilayer structure, provides resistance against high temperatures as well as a sufficient mechanical stability. Therefore, the sensor is applicable as a robust measurement tool in a wide field of industrial plasma processes. The ability of the probe to determine the electron density of the plasma as well as the collision frequency of the electrons is investigated by extensive 3D electromagnetic simulations. Measurements in a double inductively coupled plasma (DICP) reactor using different gas compositions with neutral gas temperatures exceeding 500° C confirm the suitability of the probe for a precise plasma monitoring at high temperatures.