Fabrication of Low Cost Surface Acoustic Wave Sensors Using Direct Printing by Aerosol Inkjet

Advancements in additive manufacturing techniques, printed electronics, and nanomaterials have made it possible for the cost-effective fabrication of sensors and systems. Low-cost sensors for continuous and real time monitoring of physical and chemical parameters will directly impact the energy-efficiency, safety, and manufacturing challenges of diverse technology sectors. In this paper, we present the design, printing, and characterization of a two-port surface acoustic wave (SAW) integrated on LiNbO₃ substrate. The aerosol jet printer was used for direct-writing of interdigitated transducers for SAW devices with center frequency in the range of 40-87 MHz. The linear response of a temperature sensor based on the SAW design shows promise for direct-writing of environmental sensors on low-temperature substrates.