Variability Induced Sensitivity Degradation in Coupled Nano/Micro Resonant Sensors

Coupled M/NEMS resonators arrays have recently emerged as a promising candidate for multisensing. The collective behavior of the coupled system offers new sensing methods such as eigenvalue and eigenvector with enhanced sensitivity and functionality. However, placing more than one nano-device on a chip leads to problems due to process-induced variability. This letter characterises the sensitivity of such coupled systems in light of process induced variability and verifies the same using a simple characterisation method by connecting a small array of two coupled resonators to an external electrical resonator.