Modeling of heat-moisture exchange processes in clean rooms of microelectronics

An air conditioning system plays an important role in maintaining the indoor air parameters (temperature, humidity, etc.) in a clean room of microelectronics. The purpose of the presented work is to study the heat and humidity characteristics in the room. When performing the work, the following tasks were solved: the analysis of the theory of heat-moisture exchange processes, the choice of a model for an airflow simulation at the initial and boundary conditions in a room of a given class. The 3D model of a clean room of class ISO 5 in the environment of SOLIDWORKS was constructed and simulated taking into account the influence of technological equipment and personnel. The results of computer modeling show the real distribution of air temperature and humidity in a clean room.