Influence of random vibration on MEMS capacitive accelerometer

A pendulum capacitive microaccelerometer was subjected to a random vibration. This random vibration had a profile the frequency of which was 20 Hz in 0.01 g2/Hz, frequency from 80 Hz to 350 Hz in 0.04 g2/Hz, 2000 Hz in 0.01 g2/Hz. The purpose of this research is to calculate the changes of capacitance of this microaccelerometor in the random vibration environment. This accelerometer consists of crossed-supported beams, inertial mass and two stator plates. The working axis of this accelerometer is z axis. At first, the deformations of this accelerometer were calculated at z axis under the influence of random vibration in three axis (x, y and z) by using ANSYS. And then, the changes of capacitance were calculated using these deformations.