A Compact 267 GHz Shorted Annular Ring Antenna With Surface Wave Suppression in 130 nm SiGe BiCMOS

In this letter, a compact shorted annular ring reduced surface-wave (SAR-RSW) antenna is designed and fabricated in 130 nm SiGe BiCMOS process at 267 GHz. The shorted annular ring is designed to reduce surface wave, and a rectangular slot is etched for miniaturization. The die area of proposed antenna is 450 × 600 μm2. Compared to the conventional microstrip antenna, the antenna shows higher gain around 1.8 dBi at 267 GHz. The measurement bandwidth is 17 GHz (252-269 GHz) under the condition of S11 less than -10 dB. Both the measurement and simulation results agree well.