A New Approach for VDMOSFETs’ Gate Oxide Degradation Based on Capacitance and Subthreshold Current Measurements Under Constant Electrical Stress

In this brief, we proposed a new gate oxide degradation model for vertical double diffused MOS devices under constant electrical stress. To form a complete model, we separated the changes associated with gate oxide and Si-SiO
₂
interface. We presented oxide trap-induced gate oxide and interface trap-induced Si-SiO
₂
interface degradation effects on the model, separately. We used capacitance measurements for gate oxide and subthreshold current measurements for Si-SiO
₂
interface degradation. We presented the survive of the stress-induced gate oxide and interface capacitances during stress time. We also expressed the mathematical expressions for parts of the proposed model.