Flexible Arrayed Enzymatic L-Ascorbic Acid Biosensor Based on IGZO/Al Membrane Modified by Graphene Oxide

In this study, we proposed a flexible arrayed L-ascorbic acid (L-AA) biosensor based on the indium gallium zinc oxide (IGZO)/aluminum (Al) membrane modified by graphene oxide (GO). We used screen printing technology, thermal evaporation system, and radio frequency (RF) sputtering system to fabricate the arrayed structure based on IGZO/Al membrane. Moreover, we used GO solutions with different concentrations to deposit GO membrane onto the IGZO/Al membrane, and then we deposited the ascorbate oxidase on the GO membrane in order to increase the specificity for L-AA. According to the experimental results, the average sensitivity and linearity of flexible arrayed IGZO/Al L-AA biosensor were 50.2 mV/decade and 0.993, respectively. After adding GO, the average sensitivity and linearity were increased up to 72.5 mV/decade and 0.996, respectively. Besides, the stability of the biosensor was investigated by drift effect and interfering effect. Moreover, Brunner-Emmet-Teller (BET) sorptometer was used to analyze the specific surface areas.