A MEMS Actuator System for an Integrated 3-D Optical Coherent Tomography Scanner

In this paper, we present an electrothermal biaxial MEMS actuator system, which provides x- and y-direction scanning for a fully integrated 3-D optical coherence tomography (OCT) scanner. An angular scanning range of 8° (corresponding to a 7-mm linear scanning range in both directions) is achieved, with an average power consumption of 150 mW. The resonant frequency is 668 and 297 Hz for x- and y-directions, respectively. With a footprint of only 2.5 × 2.5 mm
²
, this system is part of a device which also integrates an optical waveguide and a collimated lens on the same chip, thus making the fully integrated, self-aligned, and miniaturized 3-D OCT scanners feasible.