A study on temperature compensation for the MSRA based on the ring pipe

The Micromechanical Silicon Resonant Accelerometer (MSRA) is an important research direction of the high-precision Micro-accelerator. In order to alleviate the influence of the operating ambient temperature on the performance of MSRA, this paper analyzes temperature characteristics of the ring pipe, builds the mathematical model reflecting the relationship between the voltage and temperature of the ring pipe, and derives the functional relationship between the resonator's resonant frequency and the ring pipe's voltage. Following that, the ring pipe's voltage is adopted for direct temperature compensation of the resonator's resonant frequency. Test results suggest that the temperature compensation method show favorable compensation effects as to differential output of the MSRA, and can efficiently improve the performance of the MSRA.