Langmuir probe diagnostics of electronegative radio frequency inductively coupled plasma

Summary form only given, as follows. Langmuir probe diagnostics are performed on a electronegative radio frequency inductively coupled oxygen plasma. With a simultaneous use of single probe and double probe, an approximate ratio of the electron temperature to the negative ion temperature can be determined, and then particle densities of charged species are properly estimated. The plasma parameters including electron energy distribution function are measured as a function of the gas pressure and the power. According to the prevailing particle loss mechanism, the parameter space can be divided into a volume recombination-loss-dominated region and an ion-flux-loss-dominated region. Based on the global model equations, the scaling laws of plasma variables with the control parameters for the ion-flux-loss-dominated region are estimated and compared with experimental results. In addition, the experimentally obtained spatial profiles of plasma parameters are compared with the results of two-dimensional fluid simulation.