A design of highly sensitive pressure sensor based on film bulk acoustic resonator

A high sensitivity pressure sensor based on film bulk acoustic resonator(FBAR) is designed for detecting minuteness pressure in this paper. The FBAR pressure sensor is in shear longitudinal wave structure stimulated by lateral field. The resonant frequency of the FBAR pressure sensor obtained is calculated to be 0.739GHz. Through the finite element simulation analysis of FBAR model, the first four modes of sensor are obtained. As a result, the resonant frequency of FBAR pressure sensor is 0.7108GHz; the range of sensor, 0kPa-1800kPa; and the sensitivity of sensor, 1320Hz/kPa. The result provides a guide for future applications of this structure.