Influence of loss mechanisms on high Q whispering gallery mode (WGM) resonators suitable for RF applications

For a novel approach of resonators operating at radio frequencies (RF), extremely high quality factors (Q) in the order of Q > 100,000 are required. This work presents the impact on the Q-factors of the fundamental loss mechanisms of a micro-electro-mechanical systems (MEMS) resonator based on a disk structure working in radial bulk and whispering gallery modes (WGM). The theoretical feasibility of high Q is examined with finite element method (FEM) simulations. Thermoelastic damping (TED) and anchor losses are analyzed with FEM simulations, allowing to determine the dominant source of dissipation. Furthermore, the shortcomings of mechanical coupling in resonator arrays has been analyzed.