Compound control of pneumatic servo positioning platform based on double bellows

In order to realize the ultra-precision and the large stroke of positioning, a positioning platform based on double bellows is designed. The platform is directly driven by the new type of metal bellows, and is guided and supported by the air float guide bearing which can reduce the sliding friction. And the Mercury series grating ruler is used to detect the position in real time. By analyzing the driven model of uniaxial, the mathematical model of the two dimensional positioning platform is established, and system identification is adopted to identify the system model parameters. In order to improve the positioning accuracy, a single neuron adaptive state feedback control is designed. Experiments show that the control scheme has good adaptability and self - learning ability, system dynamic performance and static performance is improved, it meets the requirement of ultra-precision positioning and the platform accuracy has reached sub - micron level.